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Yes, Cylindrotomidae is the family I couldn't remember. I think yours is Cylindrotoma distinctissima, unless you have more species in Germany. We have only the one species in each genus. Brindle's 1967 key goes:

Dorsal processes toothed on anterior convex side ....
Triogma and Diogma

Dorsal processes not toothed ... Phalacrocera and Cylindrotoma

So they've all got big soft points along their back, but Triogma and Diogma have additional little points along the leading edge of the big points.

It says for C. distinctissima: Larvae free-living on the leaves of Caltha, Viola, Stellaria, Anemone, Petasites and Chrysosplenium, in marshy woodland. Light green, dark dorsally. Posterior spiracles dorsal, no obvious spiracular disc. Length 20 mm. Pupae hang head downward from plants, the cast larval skin retained at base of pupa.

The other terrestrial one, Diogma, is found in mosses in limestone woodland. Anal segment with posterior spiracles inside a cavity.

Best wishes
John Bratton